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Industry guidelines and standards created by International SEMATECH (ISMT), Selete, and SEMI were designed to reduce the mean time to repair (MTTR), increase overall equipment effectiveness and reduce the cost of ownership using open, secure, Internet-based technologies. Chipmakers and equipment suppliers utilize Axeda software to comply with these industry regulations as well as provide better service at a lower cost.
Axeda software benefits to Manufacturers:
- Less time to detect, diagnose and repair problems
- Improved machine availability, productivity and efficiency
- Implementation of industry standard solutions
Axeda software benefits to Equipment Suppliers:
- Reduced service costs
- Accelerated equipment qualification on installation
- Compliance with industry standards
- Proactive problem resolution
Hitachi High Technologies-Kasado Works utilizes Axeda software to comply with SEMATECH standard levels 0 through 2, and eDiagnostic enable the Hitachi Series Plasma Etch System for 300mm wafers.
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